Fine Planarization Cerium Oxide Slurry For Semiconductor Glass
Product Details
| Particle Size: | 0.5-0.8μm | CAS No.: | 1306-38-3 |
|---|---|---|---|
| CeO₂: | 63~68% | Suspension Rate: | High |
| PH Range: | 7-10 | Formulation: | Customized |
| Highlight |
Planarization cerium oxide paste,Semiconductor Glass cerium oxide paste,Planarization cerium polishing powder |
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Product Description
Slurry For Fine Planarization Of Semiconductor Glass
Description
Lichen Cerium-Based Polishing Slurry for Fine Planarization of Semiconductor Glass is a high-purity, ready-to-use slurry engineered for advanced glass planarization processes in semiconductor manufacturing. Formulated with precisely controlled cerium oxide particles, this slurry delivers excellent surface flatness, low roughness, and minimal defect generation, meeting the stringent requirements of modern semiconductor and microelectronics production.
It is suitable for polishing a wide range of semiconductor glass substrates, including carrier glass, interposer glass, and display-related semiconductor glass components.
Key Features & Advantages
High-Purity Cerium Oxide Abrasives
Low metal impurity levels help prevent contamination in sensitive semiconductor processes.
Excellent Planarization Capability
Enables uniform material removal and superior flatness across large-area glass substrates.
Low Surface Roughness
Achieves ultra-smooth surfaces required for subsequent lithography, bonding, or coating steps.
Stable Slurry Dispersion
Optimized formulation ensures minimal particle agglomeration and consistent polishing behavior.
Low Defect Density
Effectively reduces scratches, pits, and particle-related defects during fine planarization.
Tech Data
| Molecular Formula | CAS No. | CeO₂ % | D50 (μm) | Appearance | Application |
| CeO2 | 1306-38-3 | 63~68% | 0.5-0.8μm | White Powder | Semiconductor Glass |
Particle Size Distribution

Q&A
1. What is rare earth polishing powder?
Rare earth polishing powder is a high-purity compound used for polishing optical components, semiconductor wafers, and delicate surfaces like glass and lenses. It delivers a smooth, high-clarity finish without damaging the material.
2. How do I choose the right rare earth polishing powder for my application?
To select the ideal polishing powder, consider factors like the material you’re polishing, the required finish, and specifications like particle size and purity. Our sales team is available to help you choose the perfect product for your needs.
3. How should I store rare earth polishing powder?
Store in a cool, dry place, away from moisture and direct sunlight. Keep the powder in airtight containers to prevent contamination and maintain its effectiveness. With proper storage, it typically lasts 1-2 years.
4. Do you provide customized rare earth formulations?
Yes, we offer custom rare earth polishing powders and slurries, tailored to meet your specific needs, including adjustments to particle size, chemical composition, or slurry consistency.
5. Can I get a sample before making a bulk order?
Absolutely! We provide samples for evaluation. Contact our team to request a sample, and we’ll arrange the shipment.
6. How can I place an order? What is the typical delivery time?
To place an order, simply contact our sales team, who will guide you through the process and provide a quote. Delivery times vary based on order size, location, and stock availability, and we’ll give you an estimated schedule once the order is confirmed.
Product Highlights
Slurry For Fine Planarization Of Semiconductor Glass Description Lichen Cerium-Based Polishing Slurry for Fine Planarization of Semiconductor Glass is a high-purity, ready-to-use slurry engineered for advanced glass planarization processes in semiconductor manufacturing. Formulated with precisely ...
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Cerium Oxalate Powder Chemical Reagent Elements
Cerium oxalate is an oxalate salt of trivalent cerium and an important rare earth compound, often existing in the form of hydrate. 1. Basic Information English Name: Cerium(III) oxalate, Cerous oxalate Chemical Formula: (usually hydrate, where x is mostly 9 or 10) Molecular Weight (Anhydrous): 544.29 : Anhydrous: 139-42-4 Hydrate: 15750-47-7 2. Physical and Chemical Properties Appearance: White or pale yellow crystalline powder, odorless and tasteless. Solubility: Practically
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