Planarization Cerium Oxide Slurry Abrasive Polishing Paste For Semiconductor Glass
Product Details
| Particle Size: | 0.8-2.2μm | CAS No.: | 1306-38-3 |
|---|---|---|---|
| CeO₂: | 99% | Suspension Rate: | High |
| PH Range: | 7-10 | Application: | Semiconductor Glass Substrates |
| Highlight |
Cerium Oxide Slurry Paste,Planarization Cerium Oxide Slurry,Cerium abrasive polishing paste |
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Product Description
Cerium Oxide Slurry For Semiconductor Glass Substrates
Description
Lichen Cerium Oxide Slurry for Semiconductor Glass Substrates is a high-purity, water-based polishing slurry formulated specifically for semiconductor glass applications. This slurry provides excellent material removal rates, consistent surface finishes, and precise planarization, making it ideal for polishing semiconductor glass substrates used in wafer-level packaging, photomasks, and advanced integrated circuit fabrication.
Designed for use in Chemical-Mechanical Planarization (CMP) processes, Lichen's cerium oxide slurry offers stable performance in high-volume production environments while maintaining the critical surface quality and uniformity demanded by the semiconductor industry.
Key Features & Advantages
Ultra-High Purity Cerium Oxide
Reduced metal content prevents contamination of sensitive semiconductor processes and ensures superior surface finishes.
Optimized Particle Size and Distribution
Fine, uniform abrasives ensure smooth material removal, minimizing defects and improving yield during CMP processes.
Superior Surface Planarization
Achieves ultra-flat surfaces with low roughness, making it suitable for advanced semiconductor packaging and photomask applications.
Low Defect Generation
Reduces micro-scratches, surface pits, and other defects that can affect the integrity of semiconductor devices.
Stable and Consistent Performance
Batch-to-batch consistency ensures predictable results in high-throughput semiconductor manufacturing.
Tech Data
| Molecular Formula | CAS No. | CeO₂ % | D50 (μm) | Appearance | Application |
| CeO2 | 1306-38-3 | 99 | 0.8-2.2μm | White Slurry | Semiconductor Glass Substrates |
Particle Size Distribution

Q&A
1. What is rare earth polishing powder?
Rare earth polishing powder is a high-purity compound used for polishing optical components, semiconductor wafers, and delicate surfaces like glass and lenses. It delivers a smooth, high-clarity finish without damaging the material.
2. How do I choose the right rare earth polishing powder for my application?
To select the ideal polishing powder, consider factors like the material you’re polishing, the required finish, and specifications like particle size and purity. Our sales team is available to help you choose the perfect product for your needs.
3. How should I store rare earth polishing powder?
Store in a cool, dry place, away from moisture and direct sunlight. Keep the powder in airtight containers to prevent contamination and maintain its effectiveness. With proper storage, it typically lasts 1-2 years.
4. Do you provide customized rare earth formulations?
Yes, we offer custom rare earth polishing powders and slurries, tailored to meet your specific needs, including adjustments to particle size, chemical composition, or slurry consistency.
5. Can I get a sample before making a bulk order?
Absolutely! We provide samples for evaluation. Contact our team to request a sample, and we’ll arrange the shipment.
6. How can I place an order? What is the typical delivery time?
To place an order, simply contact our sales team, who will guide you through the process and provide a quote. Delivery times vary based on order size, location, and stock availability, and we’ll give you an estimated schedule once the order is confirmed.
Product Highlights
Cerium Oxide Slurry For Semiconductor Glass Substrates Description Lichen Cerium Oxide Slurry for Semiconductor Glass Substrates is a high-purity, water-based polishing slurry formulated specifically for semiconductor glass applications. This slurry provides excellent material removal rates, ...
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Cerium Oxalate Powder Chemical Reagent Elements
Cerium oxalate is an oxalate salt of trivalent cerium and an important rare earth compound, often existing in the form of hydrate. 1. Basic Information English Name: Cerium(III) oxalate, Cerous oxalate Chemical Formula: (usually hydrate, where x is mostly 9 or 10) Molecular Weight (Anhydrous): 544.29 : Anhydrous: 139-42-4 Hydrate: 15750-47-7 2. Physical and Chemical Properties Appearance: White or pale yellow crystalline powder, odorless and tasteless. Solubility: Practically
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