High-Purity Nano Ceria CMP Slurry for Semiconductor Manufacturing
Product Details
| Product Name: | Ceria CMP Slurry | Abrasive Material: | CeO₂ |
|---|---|---|---|
| Particle Size: | Customized | Purity Of CeO₂: | ≥99.9% |
| Solid Content: | Customized | PH: | Customized |
| Highlight |
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Product Description
High-Purity Nano Ceria CMP Slurry for Semiconductor Manufacturing
Product Overview
Our High-Purity Ceria CMP Slurry is manufactured using premium cerium oxide nanoparticles to support demanding semiconductor polishing applications. The carefully controlled particle size provides an optimal balance between polishing efficiency and surface quality.
Designed for advanced wafer manufacturing, the slurry offers reliable polishing performance, excellent dispersion stability, and consistent quality for industrial production.
Key Features
- High-purity nano cerium oxide
- Stable dispersion technology
- Excellent polishing consistency
- Low defectivity
- High batch consistency
- High chemical purity
- Suitable for precision CMP equipment
- OEM & customized formulations available
Particle Size Distribution

Applications
- Semiconductor wafer polishing
- Silicon wafer CMP
- Oxide layer polishing
- Precision electronic substrates
Frequently Asked Questions
Q1. What advantages does ceria CMP slurry offer?
Ceria-based CMP slurries provide excellent chemical activity, high polishing efficiency, low surface roughness, and reduced defect generation compared with many conventional abrasive systems for compatible applications.
Q2. Can the formulation be customized?
Yes. We can customize particle concentration, pH, additives, and other parameters based on customer process requirements.
Q3. Is OEM manufacturing available?
Yes. We offer OEM and private-label manufacturing services for industrial customers.
Product Highlights
High-Purity Nano Ceria CMP Slurry for Semiconductor Manufacturing Product Overview Our High-Purity Ceria CMP Slurry is manufactured using premium cerium oxide nanoparticles to support demanding semiconductor polishing applications. The carefully controlled particle size provides an optimal balance ...
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