Alumina CMP Slurry | High-Performance Aluminum Oxide Slurry For Semiconductor Chemical Mechanical Planarization
Product Details
| D50: | 50 – 300 Nm | PH: | 3 – 11 |
|---|---|---|---|
| Solid Content: | 5 – 25 | Particle Distribution: | Narrow PSD |
| Dispersion Stability: | Excellent | Defect Performance: | Low Scratch Rate |
| Highlight |
Alumina CMP slurry for semiconductors,High-performance aluminum oxide slurry,Chemical mechanical planarization slurry |
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Product Description
Alumina CMP Slurry | High-Performance Aluminum Oxide Slurry For Semiconductor Chemical Mechanical Planarization
Overview:
High-purity alumina CMP slurry designed for semiconductor wafer planarization. Stable dispersion, controllable removal rate, and excellent surface uniformity for advanced CMP processes.
Key Features & Advantages
Excellent Planarization Performance
Provides uniform material removal and superior surface flatness required in semiconductor fabrication.
Controlled Removal Rate
Optimized abrasive and chemical balance enables precise polishing control for different wafer materials.
Low Defect Generation
High dispersion stability minimizes particle agglomeration, reducing scratches and defects.
Stable CMP Operation
Maintains consistent slurry performance during long polishing cycles and automated production.
High Process Compatibility
Suitable for various CMP platforms and polishing pad systems.
Particle Size Distribution
Typical Applications
Semiconductor Manufacturing
- Silicon wafer CMP
- Oxide layer planarization
- Metal layer polishing
- Interlayer dielectric polishing
Q&A
1. Can I get a sample before making a bulk order?
Absolutely! We provide samples for evaluation. Contact our team to request a sample, and we’ll arrange the shipment.
2. How can I place an order? What is the typical delivery time?
To place an order, simply contact our sales team, who will guide you through the process and provide a quote. Delivery times vary based on order size, location, and stock availability, and we’ll give you an estimated schedule once the order is confirmed.
Product Highlights
Alumina CMP Slurry | High-Performance Aluminum Oxide Slurry For Semiconductor Chemical Mechanical Planarization Overview: High-purity alumina CMP slurry designed for semiconductor wafer planarization. Stable dispersion, controllable removal rate, and excellent surface uniformity for advanced CMP ...
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