High-Purity Cerium Oxide CMP Slurry For Silicon Wafer Planarization & Semiconductor Manufacturing
Szczegóły produktu
| Czystość: | ≥ 99,9% | solidna treść: | 5-30% wag. |
|---|---|---|---|
| Rozmiar cząstek (D50): | 50 – 150 nm | Zakres pH: | Możliwość dostosowania |
| Gęstość wad: | bardzo niski | Stabilność dyspersji: | Doskonały |
| Podkreślić |
cerium oxide CMP slurry,silicon wafer polishing slurry,semiconductor CMP slurry |
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Opis produktu
High-Purity Cerium Oxide CMP Slurry For Silicon Wafer Planarization & Semiconductor Manufacturing
Product Overview
Our cerium oxide CMP polishing slurry is engineered for ultra-precision planarization of silicon wafers used in advanced semiconductor manufacturing. The slurry combines controlled mechanical abrasion with optimized chemical activity to achieve excellent surface flatness, low defectivity, and superior wafer surface integrity.
Designed for modern CMP processes, the formulation provides stable removal rates while minimizing microscratches, particle contamination, and surface damage. The product supports high-yield production environments requiring consistent wafer quality and process repeatability.
Key Technical Advantages
- Ultra-low defectivity polishing performance
- Controlled silicon removal rate
- Excellent surface planarity and uniformity
- Reduced microscratch generation
- Stable slurry dispersion and long lifetime
- Compatible with automated CMP equipment
- High batch-to-batch consistency
Particle Size Distribution

Applications
- Silicon wafer planarization
- Prime wafer finishing
- Device wafer surface polishing
- CMP pre-clean polishing steps
- Semiconductor substrate preparation
Najważniejsze cechy produktu
High-Purity Cerium Oxide CMP Slurry For Silicon Wafer Planarization & Semiconductor Manufacturing Product Overview Our cerium oxide CMP polishing slurry is engineered for ultra-precision planarization of silicon wafers used in advanced semiconductor manufacturing. The slurry combines controlled ...
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Advanced Ceria CMP Slurry For Silicon Wafer Polishing And Semiconductor Surface Planarization
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High-Purity Cerium Oxide CMP Slurry For Silicon Wafer Planarization & Semiconductor Manufacturing
High-Purity Cerium Oxide CMP Slurry For Silicon Wafer Planarization & Semiconductor Manufacturing Product Overview Our cerium oxide CMP polishing slurry is engineered for ultra-precision planarization of silicon wafers used in advanced semiconductor manufacturing. The slurry combines controlled mechanical abrasion with optimized chemical activity to achieve excellent surface flatness, low defectivity, and superior wafer surface integrity. Designed for modern CMP processes,
Konkurencyjna cena Materiał Ziem Rzadkich Węglan Ceru Biały Proszek
Cerium Carbonate Molecular Formula: Ce₂(CO₃)₃ Appearance: Cerium carbonate is a white powder Application: Used in the manufacture of automobile exhaust purifiers, and also as an intermediate for producing metallic cerium, cerium oxide and other cerium compounds. Item Specification Testing Standard Item Ce 2 (CO 3 ) 3 -3N5B Ce 2 (CO 3 ) 3 -4NB Ce 2 (CO 3 ) 3 -4N5B Ce 2 (CO 3 ) 3 -5NB TREO(wt%) 45~50 45~50 45~50 45~50 Rare Earth Relative Purity (wt%) La 2 O 3 /TREO ≤0.01 ≤0.005
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