High-Purity Cerium Oxide CMP Slurry For Silicon Wafer Planarization & Semiconductor Manufacturing
Product Details
| Purity: | ≥ 99.9% | Solid Content: | 5-30 Wt% |
|---|---|---|---|
| Particle Size (D50): | 50 – 150 Nm | PH Range: | Customizable |
| Defect Density: | Ultra-Low | Dispersion Stability: | Excellent |
| Highlight |
cerium oxide CMP slurry,silicon wafer polishing slurry,semiconductor CMP slurry |
||
Product Description
High-Purity Cerium Oxide CMP Slurry For Silicon Wafer Planarization & Semiconductor Manufacturing
Product Overview
Our cerium oxide CMP polishing slurry is engineered for ultra-precision planarization of silicon wafers used in advanced semiconductor manufacturing. The slurry combines controlled mechanical abrasion with optimized chemical activity to achieve excellent surface flatness, low defectivity, and superior wafer surface integrity.
Designed for modern CMP processes, the formulation provides stable removal rates while minimizing microscratches, particle contamination, and surface damage. The product supports high-yield production environments requiring consistent wafer quality and process repeatability.
Key Technical Advantages
- Ultra-low defectivity polishing performance
- Controlled silicon removal rate
- Excellent surface planarity and uniformity
- Reduced microscratch generation
- Stable slurry dispersion and long lifetime
- Compatible with automated CMP equipment
- High batch-to-batch consistency
Particle Size Distribution
Applications
- Silicon wafer planarization
- Prime wafer finishing
- Device wafer surface polishing
- CMP pre-clean polishing steps
- Semiconductor substrate preparation
Product Highlights
High-Purity Cerium Oxide CMP Slurry For Silicon Wafer Planarization & Semiconductor Manufacturing Product Overview Our cerium oxide CMP polishing slurry is engineered for ultra-precision planarization of silicon wafers used in advanced semiconductor manufacturing. The slurry combines controlled ...
CMP-Grade Ceria Polishing Powder For AR Optics, Micro-Lens Arrays & Wearable Optical Sensors
CMP-Grade Ceria Polishing Powder For AR Optics, Micro-Lens Arrays & Wearable Optical Sensors Product Overview This CMP-grade ceria polishing powder is engineered for next-generation micro-optical components used in AR wearables, optical sensors, and miniaturized imaging systems. Featuring controlled reactivity and ultra-fine particle engineering, the product enables atomic-level surface finishing required for high-resolution optical performance and advanced photonics
Ultra-Fine Ceria Oxide Polishing Powder For Smart Wearable Cover Glass & Micro-Optics Finishing
Ultra-Fine Ceria Oxide Polishing Powder For Smart Wearable Cover Glass & Micro-Optics Finishing Product Overview Developed for high-volume wearable electronics production, this ultra-fine cerium oxide polishing powder enables superior finishing of smartwatch cover glass, AR headset lenses, camera windows, and micro-optical assemblies. The formulation balances chemical activity and mechanical abrasion to deliver mirror-grade surfaces while maintaining high throughput in
High Purity Cerium Oxide Polishing Powder For AR Waveguide Glass & Optical Lens Manufacturing
High Purity Cerium Oxide Polishing Powder For AR Waveguide Glass & Optical Lens Manufacturing Product Overview This high-purity ceria polishing powder is specially engineered for ultra-precision polishing of AR waveguide optics, smart glasses lenses, and advanced wearable optical modules. Designed for next-generation augmented reality manufacturing, the product delivers controlled chemical-mechanical polishing (CMP) performance, achieving exceptional surface flatness and
Cerium Oxalate Powder Chemical Reagent Elements
Cerium oxalate is an oxalate salt of trivalent cerium and an important rare earth compound, often existing in the form of hydrate. 1. Basic Information English Name: Cerium(III) oxalate, Cerous oxalate Chemical Formula: (usually hydrate, where x is mostly 9 or 10) Molecular Weight (Anhydrous): 544.29 : Anhydrous: 139-42-4 Hydrate: 15750-47-7 2. Physical and Chemical Properties Appearance: White or pale yellow crystalline powder, odorless and tasteless. Solubility: Practically
Please use our online inquiry contact form below if you have any questions, our team will get back to you as soon as possible.
