Advanced Ceria CMP Slurry For Silicon Wafer Polishing And Semiconductor Surface Planarization
تفاصيل المنتج
| نقاء: | ≥ 99.95% | محتوى صلب: | 5-30% بالوزن |
|---|---|---|---|
| حجم الجسيمات (D50): | 80 نانومتر | نطاق الرقم الهيدروجيني: | قابلة للتخصيص |
| كثافة العيوب: | منخفض للغاية | استقرار التشتت: | ممتاز |
| إبراز |
Ceria CMP slurry for silicon wafers,Semiconductor planarization polishing slurry,Rare earth CMP slurry with warranty,Semiconductor planarization polishing slurry,Rare earth CMP slurry with warranty |
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وصف المنتج
Advanced Ceria CMP Slurry For Silicon Wafer Polishing And Semiconductor Surface Planarization
Product Overview
This advanced ceria-based CMP slurry is optimized for high-precision silicon wafer polishing where nanoscale surface control is required. The chemically active cerium oxide particles promote efficient material removal while preserving crystal integrity and minimizing subsurface damage.
The slurry enables improved wafer flatness, reduced dishing and erosion effects, and enhanced process stability across large wafer diameters.
Key Technical Advantages
- High wafer flatness control
- Low dishing and erosion
- Nanometer-level surface roughness
- Excellent within-wafer uniformity
- Low particle agglomeration
- Easy post-CMP cleaning
- Suitable for high-volume manufacturing
Particle Size Distribution
Applications
- Silicon wafer final polishing
- Logic and memory wafer CMP
- Advanced packaging substrates
- 300 mm wafer manufacturing
- Surface defect reduction processes
أبرز المنتجات
Advanced Ceria CMP Slurry For Silicon Wafer Polishing And Semiconductor Surface Planarization Product Overview This advanced ceria-based CMP slurry is optimized for high-precision silicon wafer polishing where nanoscale surface control is required. The chemically active cerium oxide particles ...
Ultra-Low Defect Cerium Oxide CMP Slurry For Semiconductor Silicon Wafer Manufacturing
Ultra-Low Defect Cerium Oxide CMP Slurry For Semiconductor Silicon Wafer Manufacturing Product Overview Our ultra-low defect cerium oxide CMP slurry is designed to meet the stringent requirements of next-generation semiconductor fabrication. The slurry delivers precise chemical-mechanical interaction between abrasive particles and silicon surfaces, enabling atomic-scale planarization required for advanced nodes and high-performance devices. Engineered for compatibility with
Advanced Ceria CMP Slurry For Silicon Wafer Polishing And Semiconductor Surface Planarization
Advanced Ceria CMP Slurry For Silicon Wafer Polishing And Semiconductor Surface Planarization Product Overview This advanced ceria-based CMP slurry is optimized for high-precision silicon wafer polishing where nanoscale surface control is required. The chemically active cerium oxide particles promote efficient material removal while preserving crystal integrity and minimizing subsurface damage. The slurry enables improved wafer flatness, reduced dishing and erosion effects,
High-Purity Cerium Oxide CMP Slurry For Silicon Wafer Planarization & Semiconductor Manufacturing
High-Purity Cerium Oxide CMP Slurry For Silicon Wafer Planarization & Semiconductor Manufacturing Product Overview Our cerium oxide CMP polishing slurry is engineered for ultra-precision planarization of silicon wafers used in advanced semiconductor manufacturing. The slurry combines controlled mechanical abrasion with optimized chemical activity to achieve excellent surface flatness, low defectivity, and superior wafer surface integrity. Designed for modern CMP processes,
سعر تنافسي مادة نادرة الأرض كربونات السيريوم مسحوق أبيض
Cerium Carbonate Molecular Formula: Ce₂(CO₃)₃ Appearance: Cerium carbonate is a white powder Application: Used in the manufacture of automobile exhaust purifiers, and also as an intermediate for producing metallic cerium, cerium oxide and other cerium compounds. Item Specification Testing Standard Item Ce 2 (CO 3 ) 3 -3N5B Ce 2 (CO 3 ) 3 -4NB Ce 2 (CO 3 ) 3 -4N5B Ce 2 (CO 3 ) 3 -5NB TREO(wt%) 45～50 45～50 45～50 45～50 Rare Earth Relative Purity (wt%) La 2 O 3 /TREO ≤0.01 ≤0.005
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