Yttrium Oxide Spray Coating for Semiconductor Equipment | High-Purity Y₂O₃ Plasma Resistant Coating Material
Détails de produit
| Formule chimique: | Y₂O₃ | Pureté: | 99,9% |
|---|---|---|---|
| Morphologie: | Sphériques | Densité: | ≥ 5,0 g/cm³ |
| Résistance plasmatique: | Excellent | Contrôle des impuretés: | Qualité semi-conducteur |
| Mettre en évidence |
Yttrium oxide semiconductor coating,High-purity Y₂O₃ plasma coating,Rare earth oxide spray material |
||
Description de produit
Yttrium Oxide Spray Coating for Semiconductor Equipment | High-Purity Y₂O₃ Plasma Resistant Coating Material
Description
Yttrium Oxide (Y₂O₃) Spray Coating Material is a high-purity rare earth ceramic powder engineered for protective coatings used in semiconductor manufacturing equipment. The material is widely applied through thermal spray, plasma spray, or suspension spray coating technologies to protect critical components exposed to aggressive plasma environments.
Yttrium oxide coatings provide exceptional resistance against fluorine-based plasma corrosion, particle generation, and chemical erosion, significantly extending the service life of semiconductor processing chambers.
The coating forms a dense, chemically stable ceramic barrier that minimizes contamination and improves process stability in advanced semiconductor fabrication.
Typical Applications
Semiconductor Process Equipment Protection
- Plasma Etching Chambers
- CVD / PECVD Systems
- ALD Deposition Equipment
- Plasma Cleaning Systems
Key Components
- Electrostatic Chuck (ESC) coating
- Focus Rings
- Shower Heads
- Chamber Liners
- Edge Rings & Shields
- Wafer Handling Components
Particle Size Distribution
Why Yttrium Oxide Coating for Semiconductor Equipment
Compared with conventional alumina coatings, yttria coatings offer:
- Higher plasma erosion resistance
- Lower contamination risk
- Reduced maintenance cost
- Longer chamber service cycles
- Improved process consistency
Y₂O₃ coatings are widely adopted in advanced logic, memory, and compound semiconductor fabrication lines.
Points forts du produit
Yttrium Oxide Spray Coating for Semiconductor Equipment | High-Purity Y₂O₃ Plasma Resistant Coating Material Description Yttrium Oxide (Y₂O₃) Spray Coating Material is a high-purity rare earth ceramic powder engineered for protective coatings used in semiconductor manufacturing equipment. The ...
Competitive price for Industrial Grade Rare Earth Compound Cerium Oxide Ceo2 Glass Polishing Powder
FACTORY PRICE INDUSTRIAL GRADE CERIUM OXIDE POWDER CAS NO 1306-38-3 CEO2 HIGH PURITY 99.99% GLASS POLISHING POWDER Cerium Oxide Molecular Formula: CeO₂ Appearance: Light yellow powder Uses: Used as polishing material or as a catalyst. Item Specifications Test Basis Item CeO 2 -3N5C CeO 2 -4NC CeO 2 ...
Industrial Grade Rare Earth Compound Cerium Oxide Ceo2 Glass Polishing Powder
FACTORY PRICE INDUSTRIAL GRADE CERIUM OXIDE POWDER CAS NO 1306-38-3 CEO2 HIGH PURITY 99.99% GLASS POLISHING POWDER Cerium Oxide Molecular Formula: CeO₂ Appearance: Light yellow powder Uses: Used as polishing material or as a catalyst. Item Specifications Test Basis Item CeO 2 -3N5C CeO 2 -4NC CeO 2 ...
High Quality Industrial Grade Rare Earth Compound Cerium Oxide Ceo2 Glass Polishing Powder
FACTORY PRICE INDUSTRIAL GRADE CERIUM OXIDE POWDER CAS NO 1306-38-3 CEO2 HIGH PURITY 99.99% GLASS POLISHING POWDER Cerium Oxide Molecular Formula: CeO₂ Appearance: Light yellow powder Uses: Used as polishing material or as a catalyst. Item Specifications Test Basis Item CeO 2 -3N5C CeO 2 -4NC CeO 2 ...
Yttria (Y₂O₃) Thermal Spray Powder For Plasma Etching Chamber Protection
Yttria (Y₂O₃) Thermal Spray Powder For Plasma Etching Chamber Protection Descripti on Yttrium Oxide (Y₂O₃) Spray Coating Powder is a high-performance ceramic material developed for protective coatings in advanced semiconductor fabrication equipment. Designed for plasma spray and thermal spray ...
Veuillez utiliser notre formulaire de contact en ligne ci-dessous si vous avez des questions, notre équipe vous contactera dès que possible.
