Yttrium Oxide Spray Coating for Semiconductor Equipment | High-Purity Y₂O₃ Plasma Resistant Coating Material
Product Details
| Chemical Formula: | Y₂O₃ | Purity: | 99.9% |
|---|---|---|---|
| Morphology: | Spherical | Density: | ≥ 5.0 G/cm³ |
| Plasma Resistance: | Excellent | Impurity Control: | Semiconductor Grade |
| Highlight |
Yttrium oxide semiconductor coating,High-purity Y₂O₃ plasma coating,Rare earth oxide spray material |
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Product Description
Yttrium Oxide Spray Coating for Semiconductor Equipment | High-Purity Y₂O₃ Plasma Resistant Coating Material
Description
Yttrium Oxide (Y₂O₃) Spray Coating Material is a high-purity rare earth ceramic powder engineered for protective coatings used in semiconductor manufacturing equipment. The material is widely applied through thermal spray, plasma spray, or suspension spray coating technologies to protect critical components exposed to aggressive plasma environments.
Yttrium oxide coatings provide exceptional resistance against fluorine-based plasma corrosion, particle generation, and chemical erosion, significantly extending the service life of semiconductor processing chambers.
The coating forms a dense, chemically stable ceramic barrier that minimizes contamination and improves process stability in advanced semiconductor fabrication.
Typical Applications
Semiconductor Process Equipment Protection
- Plasma Etching Chambers
- CVD / PECVD Systems
- ALD Deposition Equipment
- Plasma Cleaning Systems
Key Components
- Electrostatic Chuck (ESC) coating
- Focus Rings
- Shower Heads
- Chamber Liners
- Edge Rings & Shields
- Wafer Handling Components
Particle Size Distribution
Why Yttrium Oxide Coating for Semiconductor Equipment
Compared with conventional alumina coatings, yttria coatings offer:
- Higher plasma erosion resistance
- Lower contamination risk
- Reduced maintenance cost
- Longer chamber service cycles
- Improved process consistency
Y₂O₃ coatings are widely adopted in advanced logic, memory, and compound semiconductor fabrication lines.
Product Highlights
Yttrium Oxide Spray Coating for Semiconductor Equipment | High-Purity Y₂O₃ Plasma Resistant Coating Material Description Yttrium Oxide (Y₂O₃) Spray Coating Material is a high-purity rare earth ceramic powder engineered for protective coatings used in semiconductor manufacturing equipment. The ...
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